| 摘要 |
PROBLEM TO BE SOLVED: To provide a light-receiving element which, with its dark current reduced, can further be narrow-pitched and can be improved in mass productivity.SOLUTION: The light-receiving element comprises a light-receiving layer 3 included in an epitaxial laminate and a pn junction 15 located at an interface between the light-receiving layer and a top layer 4 of the light-receiving layer adjoining the light-receiving layer. Pixels P are separated from each other by a mesa structure groove K penetrating the pn junction from the surface of the epitaxial laminate. The mesa structure groove K is tapered in such a way that, in the pixel P, the cross section of the light-receiving layer is contracted toward the pn junction, and the top layer includes an eaves-shaped or shade-shaped undersurface portion exposed to the mesa structure groove, so as to enclose the pn junction. |
