| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate retainer, capable of suppressing a temperature distribution on a surface of the substrate retainer and obtaining high uniform heating, and to provide a method for manufacturing the retainer. SOLUTION: The system includes a base 11, constituted of a ceramic sintered compact, on an upper surface of which the substrate is loaded; a heater 13 embedded in the base 11; a cooling plate 20 that cools the substrate; and a binding film 30, where thermal conductivity of a substance disposed between the substrate 11 and the cooling plate 20 is varied. COPYRIGHT: (C)2010,JPO&INPIT |
