TRANSFER CONTROL DEVICE, TRANSFER SYSTEM, REFERENCE TABLE CREATION METHOD, AND HOLDING POSITION CALIBRATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a transfer control device which efficiently identifies deviation of a substrate holding position when transferring a substrate.SOLUTION: A transfer control device 10 controlling a transfer mechanism 20 which transfers a substrate 60 includes: a reception section for acquiring a signal indicating passage timing of the substrate in the middle of a substrate transfer path by the transfer mechanism 20; a substrate position acquisition section for acquiring deviation of a holding position of the substrate 60 by referring to a reference table on the basis of the timing of the signal acquired by the reception section; the reference table for recording a plurality of holding positions of the substrate 60 with respect to a holding part 26 in association with the timing of the signals indicating passage of the substrate when the transfer mechanism 20 holds the substrate 60 at the respective holding positions and transfers the substrate; and an operation control section for correcting a transfer operation of the transfer mechanism 20 on the basis of the deviation of the holding position of the substrate 60 acquired by the substrate position acquisition section and transferring the substrate 60 to a target position.