发明名称 |
SPECTROSCOPE AND MICROSPECTROSCOPIC SYSTEM |
摘要 |
PROBLEM TO BE SOLVED: To provide a spectroscope and a microspectroscopic system capable of performing spectroscopy having sufficient S/N with minimum necessary light receiving elements without performing wavelength division more than necessary.SOLUTION: A spectroscope 40 used for a microspectroscopic system 1 includes: a collimating optical system 41; a diffraction grating 42 for dispersing signal light; a condensing optical system 43; a projection optical system 44 including a spatial light modulation element 46 in which multiple microlenses 46a are arranged one dimensionally in a spectral direction and each of the multiple microlenses 46a is movable in a first direction at least different from the spectral direction, in a plane substantially orthogonal to an optical axis of the microlens 46a, and including a cylindrical lens 47; and a light receiver 45 in which multiple light receiving elements 45a are arranged in a second direction in a plane substantially orthogonal to an optical axis of the projection optical system 44. |
申请公布号 |
JP2013195264(A) |
申请公布日期 |
2013.09.30 |
申请号 |
JP20120063506 |
申请日期 |
2012.03.21 |
申请人 |
NIKON CORP |
发明人 |
SATAKA RYOICHI;OSAWA HISAO |
分类号 |
G01J3/443;G01J3/06;G01J3/18;G01J3/36;G01N21/64;G02B21/00 |
主分类号 |
G01J3/443 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|