发明名称 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION
摘要 PROBLEM TO BE SOLVED: To provide a positive photosensitive resin which has sensitivity stability after exposure and a low adverse effect on environment and human body.SOLUTION: A positive photosensitive resin composition is a mixture of polymer particles mainly composed of structural units represented by general formula (1) and/or (2), in which the ratio of those 30-425 μm in diameter is 80 wt.%.
申请公布号 JP2013194075(A) 申请公布日期 2013.09.30
申请号 JP20120059728 申请日期 2012.03.16
申请人 TORAY IND INC 发明人 MINAMIHASHI KATSUYA;SASAKI ATSUSHI;YANAGISAWA YASUSHI
分类号 C08G73/10;G03F7/023;H01L21/027 主分类号 C08G73/10
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