发明名称 SCANNING PROBE MICROSCOPE
摘要 FIELD: nanotechnology.SUBSTANCE: scanning probe microscope comprises a platform with a unit of preliminary approach, piezoscanner on which the crystal resonator is mounted, which is located with the ability of interaction with the probe. The crystal resonator comprises two levers of different lengths and is located at an angle not equal to 90 degrees to the sample surface, and the probe is fixed on the long lever.EFFECT: increased reliability of the device and durability of the probes, expanding its functional capabilities.9 dwg
申请公布号 RU2494406(C2) 申请公布日期 2013.09.27
申请号 RU20090145989 申请日期 2009.12.14
申请人 ZAKRYTOE AKTSIONERNOE OBSHCHESTVO "NANOTEKHNOLOGIJA MDT" 发明人 BYKOV VIKTOR ALEKSANDROVICH;BYKOV ANDREJ VIKTOROVICH;SHIKIN SEMEN ARKAD'EVICH
分类号 G01Q70/00 主分类号 G01Q70/00
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