发明名称 SAMPLE-TRANSMITTED LIGHT DETECTION METHOD AND SAMPLE-TRANSMITTED LIGHT DETECTION APPARATUS
摘要 PROBLEM TO BE SOLVED: To make it possible to accurately detect absorption characteristics of a sample by allowing light to transmit the sample.SOLUTION: A sample-transmitted light detection method includes: a step of housing a sample in a sample cell whose thickness continuously changes in one direction; a step of condensing light having predetermined wavelength to irradiate the sample cell with the light, and radiating the light to at least two measuring positions having different thicknesses of the sample; a step of measuring transmitted light intensity of light transmitting the at least two measuring positions; a step of allowing light, which has the same or a different wavelength as/from the predetermined wavelength, to scan a predetermined section of the sample cell along the one direction to create an interference fringe of light having transmitted the predetermined section, and detecting a difference between the thicknesses of the measuring positions based on the interference fringe; and step of detecting absorption coefficient based on the transmitted light intensity at the measuring positions and the difference between the detected thicknesses of the measuring positions.
申请公布号 JP2013190423(A) 申请公布日期 2013.09.26
申请号 JP20130029429 申请日期 2013.02.18
申请人 UNIV OF TSUKUBA 发明人 NAM YOUNG JUN;TSUJIMOTO MANABU;KADOWAKI KAZUO
分类号 G01N21/27;G01N21/03;G01N21/33;G01N21/35;G01N21/45;H01L39/22 主分类号 G01N21/27
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