| 摘要 |
PROBLEM TO BE SOLVED: To provide a zinc oxide-based transparent oxide film which has a low refractive index and excellent gas barrier properties, and to provide a method of producing the same.SOLUTION: A transparent oxide film is amorphous, and has a composition which contains, based on the total metal component amount, 0.9-20.0 at% Al and 25.5-68.0 at% Si with the balance consisting of Zn and unavoidable impurities. In a production method, DC sputtering is conducted under the environment being at least one of in an inert gas atmosphere that contains oxygen and in the state of heating a substrate, using a sputtering target consisting of an oxide sintered compact which has a composition that contains, based on the total metal component amount, 0.3-4.0 wt% Al and 6.0-14.5 wt% Si with the balance consisting of Zn and unavoidable impurities, and has a composite oxide ZnSiOand ZnO present in the structure of the sintered compact. |
