发明名称 STAGE ASSEMBLY WITH SECURE DEVICE HOLDER
摘要 A stage assembly (10) that moves a device (22) includes a device holder (20) that selectively retains the device (22). The device holder (20) includes a pivot (330) that engages the device (22), and a pressure source (326) that creates (i) a pressure controlled, distal zone (336A) that is at a distal pressure, and (ii) a pressure controlled, proximal zone (338A) that is at a proximal pressure. The distal zone (336A) generates a distal moment (344A) and the proximal zone (336B) generates a proximal moment (346A) that can be used to control the shape of the device (22).
申请公布号 US2013250271(A1) 申请公布日期 2013.09.26
申请号 US201313768211 申请日期 2013.02.15
申请人 NIKON CORPORATION 发明人 PHILLIPS ALTON H.;HASHEMI FARDAD;MATSUDA TAKESHI
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
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