发明名称 VIBRATION ELEMENT, VIBRATION DEVICE AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a vibration element capable of exhibiting excellent vibration characteristics, and further to provide a vibration device that is provided with the vibration element and is excellent in reliability and an electronic apparatus.SOLUTION: A vibration element 2 has a base portion 4 and three vibration arms 5, 6 and 7 that extend from the base portion 4 in a y-axis direction and are provided side by side in an x-axis direction. The vibration arms 5 and 6 are subjected to bending vibration (oblique vibration) in a direction having components in both directions of a z-axis direction and the x-axis direction. The vibration arm 7 is subjected to a bending vibration in the z-axis direction and cancels out vibration in the z-axis direction generated by vibration of the vibration arms 5 and 6.
申请公布号 JP2013192013(A) 申请公布日期 2013.09.26
申请号 JP20120056459 申请日期 2012.03.13
申请人 SEIKO EPSON CORP 发明人 ISHII MASAHIRO
分类号 H03H9/19;G01C19/5607;H01L41/08;H01L41/09;H01L41/18;H01L41/22;H03H9/215 主分类号 H03H9/19
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