发明名称 |
Edge structure of power semiconductor component includes electrically- conducting layer deposited on parts of insulating layer in contact with region between conductivity types. |
摘要 |
<p>On parts of the insulation layer an electrically conducting layer is deposited, which contacts part of the first region of the second conductivity type. The side wall has concave curvature transitioning into the trench base, where a further trench is arranged. An independent claim is included for the corresponding method of manufacture.</p> |
申请公布号 |
DE10342559(B3) |
申请公布日期 |
2005.04.14 |
申请号 |
DE2003142559 |
申请日期 |
2003.09.15 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
FALCK, ELMAR;MAUDER, ANTON |
分类号 |
H01L29/06;H01L29/861;(IPC1-7):H01L29/06;H01L29/739;H01L29/78 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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