发明名称 LIQUID CRYSTAL ON SILICON DISPLAY PANEL AND METHOD FOR MANUFACTURING THE SAME
摘要 A liquid crystal on silicon display panel and a method for manufacturing the same are disclosed. The method includes the following steps. First, a semiconductor substrate having a pixel region with at least one first top metal pattern and a first anti-reflection coating structure substantially disposed thereon and a circuit region with is at least one second top metal pattern and a second anti-reflection coating structure substantially disposed thereon is provided. Moreover, the circuit region surrounds the pixel region. Next, the first anti-reflection coating structure is removed. Afterward, a dielectric layer is formed on the semiconductor substrate and covering the first top metal pattern. Then, a passivation layer is formed on the dielectric layer. After that, a portion of the passivation layer and a portion of the second anti-reflection coating structure thereunder are removed to form an opening exposing a portion of the second top metal pattern.
申请公布号 US2013250219(A1) 申请公布日期 2013.09.26
申请号 US201213428019 申请日期 2012.03.23
申请人 TSAI CHING-HUEI;UNITED MICROELECTRONICS CORPORATION 发明人 TSAI CHING-HUEI
分类号 G02F1/1335;H01L33/08 主分类号 G02F1/1335
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