| 摘要 |
PURPOSE: A filter for a wafer carrier is provided to improve filtering efficiency of a micro particle by extending both sides of a filter receiving part as dissymmetric shape and securing a sufficient airway and sufficient filter receiving part. CONSTITUTION: A receiving space is formed inside a body in order to accept wafers. A cover(20) closes an opening of the body in order to safely carry and store the wafers. A protrusion forms an airway in order to be connected to the inside the body. A filter(30) filters moisture and micro particles within 0.3 to 0.1micrometers in the air. Filter housing forms a ventilation pipe portion at one side of a filter receiving part. |
