发明名称 SLIT NOZZLE FOR MANUFACTURING SOLAR CELL, AND CHEMICAL SOLUTION APPLYING DEVICE
摘要 PROBLEM TO BE SOLVED: To stably and uniformly apply a chemical solution on a glass plate used for a solar cell at desired membrane thickness.SOLUTION: In the slit nozzle 10, a front lip 12 and a rear lip 14 of each half-body section parallely extending in a nozzle longitudinal direction are abutted while sandwiching a shim 16 to form a nozzle body, and a flexible chemical solution guide member 30 is mounted to a front lip tip 12a. The chemical solution guide member 30 diagonally projects from a bottom end of the front lip tip 12a, and extends to a bottom of a rear lip tip 14a through a bottom of an emission port 18. A chemical solution Memitted from the emission port 18 of the slit nozzle 10 in a belt-like manner flows diagonally downward and backward along the chemical solution guide member 30, and drops onto a surface of a glass plate G, so as to form a solution membrane (coating membrane) FMof desired membrane thickness.
申请公布号 JP2013187236(A) 申请公布日期 2013.09.19
申请号 JP20120049167 申请日期 2012.03.06
申请人 TOKYO ELECTRON LTD 发明人 WAKAMOTO YUKIHIRO;NAGATA HIROSHI
分类号 H01L31/04;B05C5/02 主分类号 H01L31/04
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