发明名称 |
MAGNETIC SENSOR MANUFACTURING |
摘要 |
A magnetic sensor comprising a first shield and a second shield and a sensor stack between the first and the second shield, the sensor stack having a plurality of layers wherein at least one layer is annealed using in-situ rapid thermal annealing. In one implementation of the magnetic sensor a seed layer is annealed using in-situ rapid thermal annealing. Alternatively, one of a barrier layer, an AFM layer, and a cap layer is annealed using in-situ rapid thermal annealing.
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申请公布号 |
US2013244192(A1) |
申请公布日期 |
2013.09.19 |
申请号 |
US201213419728 |
申请日期 |
2012.03.14 |
申请人 |
HE QING;JUNG WONJOON;COVINGTON MARK WILLIAM;KIEF MARK THOMAS;CHEN YONGHUA;SEAGATE TECHNOLOGY LLC |
发明人 |
HE QING;JUNG WONJOON;COVINGTON MARK WILLIAM;KIEF MARK THOMAS;CHEN YONGHUA |
分类号 |
G11B5/40;B05D3/02;B05D3/10;F27D3/00;G11B5/127 |
主分类号 |
G11B5/40 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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