METHOD OF MANUFACTURING CARBON NANOTUBE SHEET, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND SUBSTRATE FOR FORMING CARBON NANOTUBE

摘要

PROBLEM TO BE SOLVED: To provide a novel method of manufacturing a carbon nanotube sheet, capable of manufacturing the carbon nanotube sheet with high reliability.SOLUTION: A method of manufacturing a carbon nanotube sheet includes a process for forming a groove G to a substrate 10, a process for attaching metal 32 on the substrate 10, a process for forming a carbon nanotube 40 to the substrate 10 with the metal 32 as a catalyst, and a process for separating the carbon nanotube 40 from the substrate 10.