发明名称 |
Systems and methods for forming apertures in microfeature workpieces |
摘要 |
Systems and methods for forming apertures in microfeature workpieces are disclosed herein. In one embodiment, a method includes directing a laser beam toward a microfeature workpiece to form an aperture and sensing the laser beam pass through the microfeature workpiece in real time. The method can further include determining a number of pulses of the laser beam and/or an elapsed time to form the aperture and controlling the laser beam based on the determined number of pulses and/or the determined elapsed time to form a second aperture in the microfeature workpiece.
|
申请公布号 |
US8536485(B2) |
申请公布日期 |
2013.09.17 |
申请号 |
US20060413289 |
申请日期 |
2006.04.28 |
申请人 |
WATKINS CHARLES M.;HIATT WILLIAM M.;MICRON TECHNOLOGY, INC. |
发明人 |
WATKINS CHARLES M.;HIATT WILLIAM M. |
分类号 |
B23K26/38;B23K26/03;B23K26/04;B23K26/40;G01N21/86;H01L21/76;H01L21/768;H05K3/00 |
主分类号 |
B23K26/38 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|