发明名称 |
SHEET FOR FORMING RESIN FILM FOR CHIPS |
摘要 |
<p>[Problem] To impart heat release properties to a resulting semiconductor device without increasing the number of semiconductor device production steps or subjecting the semiconductor wafer or chip to special treatment that will complicate the process. [Solution] The sheet for forming a resin film for chips comprises a support sheet and a resin film-forming layer formed on the support sheet, wherein the resin film-forming layer comprises binder polymer component (A), curable component (B) and inorganic filler (C), and the thermal diffusivity of the resin film-forming layer is 2 x 10-6 m2/s or greater.</p> |
申请公布号 |
WO2013133268(A1) |
申请公布日期 |
2013.09.12 |
申请号 |
WO2013JP55981 |
申请日期 |
2013.03.05 |
申请人 |
LINTEC CORPORATION |
发明人 |
AZUMA, YUICHIRO;ICHIKAWA, ISAO |
分类号 |
H01L21/52;C08J5/18;C08K3/00;C08L101/00;C09J7/02;C09J11/04;C09J201/00;H01L23/00;H01L23/29;H01L23/31 |
主分类号 |
H01L21/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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