发明名称 Methods and Apparatus for Recovery of Silicon and Silicon Carbide from Spent Wafer-Sawing Slurry
摘要 Methods, systems, and apparatus are disclosed herein for recovery of high-purity silicon, silicon carbide and PEG from a slurry produced during a wafer cutting process. A silicon-containing material can be processed for production of a silicon-rich composition. Silicon carbide and PEG recovered from the silicon-containing material can be used to form a wafer-saw cutting fluid. The silicon-rich composition can be reacted with iodine containing compounds that can be purified and/or used to form deposited silicon of high purity. The produced silicon can be used in the photovoltaic industry or semiconductor industry.
申请公布号 US2013236387(A1) 申请公布日期 2013.09.12
申请号 US201213718389 申请日期 2012.12.18
申请人 IOSIL ENERGY CORPORATION 发明人 FALLAVOLLITA JOHN ALLAN
分类号 C01B33/027 主分类号 C01B33/027
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