| 摘要 |
<p>An energy consumption monitoring system for a substrate treatment device monitors the energy consumption of the substrate treatment device for performing predetermined treatment on a substrate to be treated, and is provided with: a storage means for storing energy consumption data indicating the relationship between an event accompanied by energy consumption in the treatment by the substrate treatment device, and an energy amount consumed by the occurrence of the event; and a means for collecting process treatment data from the substrate treatment device, detecting the occurrence of the event accompanied by energy consumption, and calculating, by addition, the amount of energy consumption from the duration time of the event and the energy consumption data relating to the event and stored in the storage means.</p> |
