发明名称 |
PATTERNING OF NON-CONVEX SHAPED NANOSTRUCTURES |
摘要 |
<p>Methods of making nano-scale structures with geometric cross-sections, including convex or non-convex cross-sections, are described. The approach may be used to directly pattern substrates and/or create imprint lithography templates or molds that may be subsequently used to directly replicate nano-shaped patterns into other substrates, such as into a functional or sacrificial resist to form functional nanoparticles.</p> |
申请公布号 |
EP2635419(A2) |
申请公布日期 |
2013.09.11 |
申请号 |
EP20110838943 |
申请日期 |
2011.11.07 |
申请人 |
MOLECULAR IMPRINTS, INC.;BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM |
发明人 |
SREENIVASAN, SIDLGATA V.;SINGH, VIKRAMJIT;XU, FRANK Y.;CHOI, BYUNG-JIN |
分类号 |
B29C33/42;B82B1/00;B82B3/00;B82Y40/00;G03F7/00 |
主分类号 |
B29C33/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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