| 摘要 |
<p>PURPOSE: A vacuum absorption plate for fixing a substrate is provided to improve adhesion in the final process by supplementing the extent of the substrate regardless of the substrate. CONSTITUTION: A top plate (10) has a plurality of vacuum holes. A middle plate (20) includes a plurality of vacuum paths (23) which supply vacuums to the vacuum holes. A bottom plate (30) closes the vacuum paths which are formed by the middle plate. A base plate (40) fixes a vacuum supply device (50) to the lower side of the bottom plate. Fixing holes (11,21,31,41) are formed to fix the top plate, the middle plate, the bottom plate, and the base plate.</p> |
