| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxide sputtering target capable of forming a flexible and difficult-to-crack film with high sustaining property as a protective film of an optical recording medium, and capable of performing DC sputtering with few particles generated during the sputtering.SOLUTION: An oxide sputtering target includes, with respect to the total amount of the metal component, 0.15 at% or more in total of one or more among Al, Ga, and In, 7 at% or more of Sn, 36 at% or less in total of Al, Ga, In, and Sn, and the balance comprising Zn and unavoidable impurities. |
