| 摘要 |
PURPOSE: The pre-discharging unit of a substrate coating apparatus is provided to tightly maintain the horizontal state of a thin plate using a tension unit and to manage the state of a nozzle after a pre-discharging process. CONSTITUTION: The pre-discharging unit of a substrate includes a thin plate(110), a tension unit(120), and a transferring unit(140). The thin plate is formed such that the length of the thin plate corresponds to the width of a substrate to be processed. The tension unit applies tension to the thin plate by pulling the thin plate. The transferring unit transfers the thin plate with respect to the substrate to be processed. The thin plate is wound around a pair of supports to be fixed. A gap between the supports is adjusted to apply or release tension with respect to the thin plate. |
