NITRIDE SINGLE CRYSTAL WITH THROUGH HOLE, AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a nitride single crystal with a through hole which allows the through hole having a specific size to be precisely formed in the nitride single crystal having a large thickness.SOLUTION: A method of manufacturing a nitride single crystal with a through hole 102 forms the through hole 102 whose 70% or more in a thickness direction thereof has a diameter in the range of 200-600 μm. The method includes: interposing loose abrasive between a major surface 103 of a nitride single crystal 101 having a thickness of 100-1000 μm and a tool; and punching the nitride single crystal 101 in a thickness direction thereof by pressing at least one of the nitride single crystal 101 and the tool while subjecting the tool to supersonic vibration.