| 摘要 |
PROBLEM TO BE SOLVED: To provide a tin oxide-based sintered body capable of stably forming a tin oxide-based transparent conductive film regardless of a film formation method.SOLUTION: A tin oxide-based sintered body is mainly composed of a tin oxide phase and a metal tin phase, and the metal tin phase is uniformly dispersed without being segregated in the sintered body. It is desired that the tin oxide-based sintered body contains a composite oxide phase with at least one type of dopant element selected from the group consisting of tin oxide, tantalum, niobium and tungsten. The tin oxide-based sintered body is worked so as to be used as, for example, a target for spattering. |
