Measurement apparatus for measuring shape of test object and measurement method

摘要

A measurement apparatus includes: a vibration detection surface (9) which has a set relative position with respect to a test surface (8), and is irradiated with a part of the measurement light; an image sensor (16) configured to sense, together with a first interference fringe generated by interference between reference light from a reference surface (11) and measurement light from the test surface, a second interference fringe generated by interference between light from the vibration detection surface and the reference light; and a processor (17) configured to obtain a relative vibration between the reference surface and the test surface by using data of the sensed second interference fringe, and obtain the shape of the test surface by using the obtained relative vibration and data of the sensed first interference fringe.