| 摘要 |
PROBLEM TO BE SOLVED: To provide a handler capable of suppressing pressure variation caused by vaporization of liquid nitrogen and excess cooling of a stage, and a component inspection apparatus including the handler.SOLUTION: The handler includes: a storage tank 55 for storing liquid nitrogen; supply channels 61 and 66 for supplying a coolant from the storage tank 55 to inner passages 62 and 67 of a first shuttle 15; valves 63 and 68 for opening/closing the supply channels 61 and 66; and a heat exchanger 70 having vaporization chambers 71 and 72 each having a channel cross section larger than that of each of the supply channels 61 and 66 and capable of vaporizing the liquid nitrogen in the vaporization chambers 71 and 72. Since the respective vaporization chambers 71 and 72 are filled with vaporized nitrogen gas in prior, pressure variation following vaporization of succeeding liquid nitrogen can be eased. Since nitrogen gas is supplied to the respective inner passages 62 and 67, excess cooling in storage pockets 17a and 17b can be also suppressed. |
