发明名称 |
SEMICONDUCTOR-DEVICE MANUFACTURING METHOD, STORAGE MEDIUM, AND SEMICONDUCTOR DEVICE |
摘要 |
<p>A semiconductor-device manufacturing method having the following steps: a step in which a second conductive layer is formed on top of an underlayer that has an insulating layer in which a recess is formed and a first conductive layer that is exposed at the bottom of said recess; a step in which a third conductive layer is formed on top of the aforementioned second conductive layer; a step in which a material that is capable of forming a solid solution with the third conductive layer is deposited onto said third conductive layer; and a step in which the third conductive layer with the aforementioned solid-solution-forming material deposited thereon is heated.</p> |
申请公布号 |
WO2013125449(A1) |
申请公布日期 |
2013.08.29 |
申请号 |
WO2013JP53581 |
申请日期 |
2013.02.14 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
MATSUMOTO, KENJI;HAMADA, TATSUFUMI |
分类号 |
H01L21/3205;C23C14/34;H01L21/768;H01L23/532 |
主分类号 |
H01L21/3205 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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