发明名称 SEMICONDUCTOR-DEVICE MANUFACTURING METHOD, STORAGE MEDIUM, AND SEMICONDUCTOR DEVICE
摘要 <p>A semiconductor-device manufacturing method having the following steps: a step in which a second conductive layer is formed on top of an underlayer that has an insulating layer in which a recess is formed and a first conductive layer that is exposed at the bottom of said recess; a step in which a third conductive layer is formed on top of the aforementioned second conductive layer; a step in which a material that is capable of forming a solid solution with the third conductive layer is deposited onto said third conductive layer; and a step in which the third conductive layer with the aforementioned solid-solution-forming material deposited thereon is heated.</p>
申请公布号 WO2013125449(A1) 申请公布日期 2013.08.29
申请号 WO2013JP53581 申请日期 2013.02.14
申请人 TOKYO ELECTRON LIMITED 发明人 MATSUMOTO, KENJI;HAMADA, TATSUFUMI
分类号 H01L21/3205;C23C14/34;H01L21/768;H01L23/532 主分类号 H01L21/3205
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