3D SHAPE MEASUREMENT APPARATUS

摘要

Provided is a 3D shape measurement apparatus that can easily determine whether the object to be measured is actually located in the field of view. A polarization splitting element 13 splits light to be measured containing phase information on a measurement sample S into a first polarized beam L4-1 and a second polarized beam L4-2 different in polarization direction from the first polarized beam L4-1. A first optical system 14 telecentric on one side focuses the first and second polarized beams L4-1 and L4-2 individually. A pinhole plate 15 is provided with a first pinhole 15a and a second pinhole 15b. The first pinhole 15a forms a first projection beam L5-1 from the first polarized beam L4-1 focused by the first optical system 14. The second pinhole 15b forms a second projection beam L5-2 from the second polarized beam L4-2 focused by the first optical system 14. A second optical system 16 forms an image G of interference fringes by superimposing the first projection beam L5-1 and the second projection beam L5-2 with optical axes thereof inclined to each other.