| 摘要 |
PROBLEM TO BE SOLVED: To provide a control apparatus and a control method capable of performing calibration of the polarization state.SOLUTION: A control apparatus includes an irradiation unit configured to irradiate a measurement object with a measuring beam, a restriction unit configured to restrict the measuring beam from being incident on the measurement object and to reflect or scatter the measuring beam, and a polarization control unit configured to control, based on the measuring beam reflected or scattered by the restriction unit, polarization of the measuring beam. |
