INDUCTION HEATING COIL AND METHOD FOR MANUFACTURING MONOCRYSTAL USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a coil of which the coil heating temperature distribution in the peripheral direction is reduced, and to provide a method for manufacturing a successful quality FZ monocrystal with small expansion resistance variation of a wafer outer peripheral part by using the coil.SOLUTION: A ring-like induction heating coil is equipped to a monocrystal manufacturing device by an FZ method, the coil has a slit 2 which separates both ends from each other, in which the coil rear surface within a range of 20 degrees or more and 80 degrees or less centering on a straight line going from the center of the coil to the center of the slit 2 is flat, and a taper which becomes thicker from the inner peripheral direction to the outer peripheral direction is attached to the coil rear surface within a range except the rear surface flat part 4.