IN-SITU ANNEALING IN ROLL TO ROLL SPUTTER WEB COATER AND METHOD OF OPERATING THEREOF

摘要

An apparatus for processing a flexible substrate is described. The apparatus includes an unwinding module configured for providing the flexible substrate, a deposition module configured for depositing a layer on the flexible substrate, an annealing module having one or more heaters configured for in-situ annealing the layer, and a winding module configured for winding of the substrate with the annealed layer.