Method for detecting surface defects of a level surface

摘要

The method involves illuminating an upper surface with planar wave front, and recording an image of the wave front reflected in the upper surface. The upper surface defects are determined by analysis of intensity distribution of the recorded image. Brightness surfaces (11) in the image are detected and evaluated during the analysis of intensity distribution of the recorded image. Intensity profiles in two dimensions of the image are evaluated for detection of the brightened surfaces. A determination of the surface defects is carried out by comparison with simulation results.