THE REVERSING GEAR OF A SUBSTRATE, THE REVERSAL METHOD, AND THE PROCESSING UNIT OF A SUBSTRATE

摘要

PURPOSE: Inversion apparatus of a substrate, inversion method and processing apparatus of a substrate are provided to prevent crosswisely movement of a substrate by not applying a local stress to a substrate. CONSTITUTION: A rotating body is rotated by a rotation driving source. A pair of first mover supporters are arranged along the rotary axis of the rotating body. A first support member supports both end units of one side of a substrate. A pair of second mover supporters (27) are arranged not to interfere the first mover supporter. A second support member (32) is faced to both end units of the other side of the substrate.