Flow channel structure, method of manufacturing same, and liquid ejection head

摘要

A flow channel structure includes: a first substrate in which a first flow channel section is arranged; a first adhesive layer which is arranged on the first substrate; a first noble metal layer containing gold and arranged over the first adhesive layer on the first substrate; a second substrate in which a second flow channel section is arranged; a second adhesive layer arranged on the second substrate; a second noble metal layer containing gold and arranged over the second adhesive layer on the second substrate; and an Au tubular structure disposed between the first and second noble metal layers which face to each other across the Au tubular structure, the Au tubular structure having a hollow portion serving as a connecting flow channel section which connects the first and second flow channel sections, a gold content of the Au tubular structure being not lower than 90 at. %.