发明名称 |
METHOD FOR SHRINKING LINEWIDTH OF EXTREME DIMENSION |
摘要 |
A method for shrinking a linewidth on a substrate includes the steps of applying a stretching force on the substrate, defining a line on a top surface of the substrate and releasing the applied stretching force. The applied force is executed by mechanical stretching or thermal expansion and has a direction parallel to the line.
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申请公布号 |
US2013213817(A1) |
申请公布日期 |
2013.08.22 |
申请号 |
US201213470095 |
申请日期 |
2012.05.11 |
申请人 |
LO CHENG-YAO;LIAO KUAN-HSUN |
发明人 |
LO CHENG-YAO;LIAO KUAN-HSUN |
分类号 |
C25D5/00;C25D5/54;C25D5/56 |
主分类号 |
C25D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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