发明名称 ARCUATE MOTION CONTROL IN ELECTROSTATIC ACTUATORS
摘要 In one embodiment, an actuator includes a moving frame coupled to a fixed frame by a plurality of elongated parallel motion flexures for generally parallel motion relative to the fixed frame and between an as-fabricated position and a deployed position. The flexures are disposed at a first angle relative to a line extending perpendicularly to both the moving frame and the fixed frame when the moving frame is disposed in the as-fabricated position, and at a second angle relative to that same line when the moving frame is disposed in the deployed position, Arcuate movement of the first frame relative to the second frame is controlled by constraining the first angle to a value of less than about half of the sum of the first and second angles.
申请公布号 US2013215325(A1) 申请公布日期 2013.08.22
申请号 US201313843817 申请日期 2013.03.15
申请人 DIGITALOPTICS CORPORATION MEMS;DIGITALOPTICS CORPORATION MEMS 发明人 CALVET ROBERT J.;LIU XIAOLEI;GUTIERREZ ROMAN C.;JAIN ANKUR;WANG GUIQIN
分类号 H04N5/225;G02B7/04 主分类号 H04N5/225
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