| 发明名称 |
APPARATUS AND METHOD FOR SAWING SINGLE CRYSTAL INGOT |
| 摘要 |
<p>Provided are an apparatus and a method for sawing a single crystal ingot. The apparatus includes a wire saw sawing an ingot, a roller driving the wire saw, and a bath containing a liquid cooling the ingot before sawing the ingot.</p> |
| 申请公布号 |
EP2627488(A2) |
申请公布日期 |
2013.08.21 |
| 申请号 |
EP20110832694 |
申请日期 |
2011.09.16 |
| 申请人 |
LG SILTRON INC. |
发明人 |
KWON, KI-SOO;CHO, HEUI-DON;JI, DONG-OUK |
| 分类号 |
B28D5/04;B23D61/18;B24B27/06;H01L21/304 |
主分类号 |
B28D5/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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