Assembly and method for positioning a machining tool relative to a workpiece

摘要

The arrangement has an object (O2) displaceable along a movement direction (X) relative to another object (O1). An alignment sensor (W) is arranged on the former object for detecting an object alignment mark (M1) and a workpiece alignment mark (M2). A scannable measuring scale (S) extending along the movement direction is arranged on the former object. Two scanning units (E1, E2) are arranged on the latter object to scan the measuring scale and to determine a relative position between the objects along the movement direction, where the scanning units have a defined offset. The object alignment- and workpiece alignment marks are provided as microstructures. The alignment sensor is arranged as a microscope or camera equipped with an electronic image sensor. An independent claim is also included for a method for positioning a processing tool relative to a workpiece.