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发明名称
BUILT-IN SUBSTRATE INSPECTION METHOD
摘要
申请公布号
KR20130092462(A)
申请公布日期
2013.08.20
申请号
KR20130012746
申请日期
2013.02.05
申请人
NIDEC-READ CORPORATION
发明人
YAMASHITA MUNEHIRO;GOTO AKIRA;KURIHARA YASUHITO
分类号
G01R31/28;G01R1/067
主分类号
G01R31/28
代理机构
代理人
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地址
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