| 摘要 |
PURPOSE: A miniature microphone which combines an integrated circuit with a nanowire having a piezoelectric property is provided to maximize a piezoelectric effect. CONSTITUTION: A miniature microphone(100) includes a membrane vibrating plate(110), a piezoelectric nanowire(120), and an integrated circuit part(135). A sound reaches the membrane vibrating plate, and the membrane vibrating plate causes a displacement. The piezoelectric nanowire coverts the vibration of the membrane vibrating plate due to the sound into an electric signal by contacting with the membrane vibrating plate. The integrated circuit part amplifies the signal transformed in the piezoelectric nanowire. The integrated circuit part forms a n+ channel, a source electrode(130), a drain electrode(!40), a resistor(141), a gate electrode(160), a SiO2 layer(165), and a power source terminal(150) on a p type semiconductor substrate(170) which is a n channel MOSFET device. |
