发明名称 SEMICONDUCTOR STORAGE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor storage device capable of suppressing increase in an occupied area.SOLUTION: A semiconductor storage device has a non-volatile memory (cell array CA part), a volatile memory (latch circuit LDL part), and a sense amplifier. The latch circuit LDL part has a lamination structure similar to that of the cell array CA part, and has a memory string configured by connecting a plurality of memory transistors in series, and first and second selection transistors whose one ends are connected to both ends of the memory string. The memory string has a semiconductor layer, a charge storage layer, and a conductive layer. The semiconductor layer extends in a vertical direction to a substrate 20. A charge storage layer 43b surrounds a lateral face of a columnar semiconductor layer 44. Word line conductive layers 41a-41d surround the lateral face of the columnar semiconductor layer via the charge storage layer. A predetermined fixed potential is supplied to gates of the memory transistors of the latch circuit LDL part. A memory semiconductor layer 44A functions as a capacitor. A semiconductor layer 53a and a source line 61 are not connected with each other.
申请公布号 JP2013161803(A) 申请公布日期 2013.08.19
申请号 JP20120019726 申请日期 2012.02.01
申请人 TOSHIBA CORP 发明人 FUKUDA MAKOTO;TAKASHIMA DAIZABURO
分类号 H01L21/8247;G11C16/04;H01L21/336;H01L21/8242;H01L27/10;H01L27/108;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
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