LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, PIEZOELECTRIC ELEMENT, AND METHOD FOR EVALUATING PIEZOELECTRIC LAYER

摘要

A liquid ejecting head includes a piezoelectric element including a piezoelectric layer made of a piezoelectric material and an electrode disposed on the piezoelectric layer. The piezoelectric material is such that when a diamond conical indenter having an angle alpha of 136° between opposite faces is pressed into the piezoelectric layer at a load of 5 gf for 5 seconds to form cracks extending from an indentation, using a micro Vickers hardness meter, the length of the cracks from four corners of the indentation is 15 mum or less.