发明名称 SEMICONDUCTOR DEVICE AND LAYOUT DATA PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a layout data processing device which can uniformize the coverage of a pattern on a semiconductor substrate.SOLUTION: A layout data processing device 10 comprises: a layout pattern arrangement section 2 that arranges a layout pattern on a semiconductor substrate; a dummy pattern arrangement section 3 that uniformly arranges a dummy pattern, which is constituted by a plurality of unit dummy patterns, over an entire pattern arrangement area on the semiconductor substrate irrespective of a location where the layout pattern is arranged; a dummy pattern adjustment section 4 that performs adjustment for at least one of enlargement, reduction, and removal in at least part of the plurality of unit dummy patterns; and a timing verification section 5 that performs timing verification using the layout pattern and dummy pattern arranged on the semiconductor substrate after adjustment is performed by the dummy pattern adjustment section.
申请公布号 JP2013156842(A) 申请公布日期 2013.08.15
申请号 JP20120016993 申请日期 2012.01.30
申请人 TOSHIBA CORP 发明人 FUJITA SATORU;FUJII SHINJI;WAKITA NAOKI
分类号 G06F17/50;H01L21/82;H01L21/822;H01L27/04 主分类号 G06F17/50
代理机构 代理人
主权项
地址