发明名称 SOLAR CELL INSPECTION DEVICE AND SOLAR CELL PROCESSING DEVICE
摘要 A solar cell (100) inspection device (1) provided with: a visible light source (11) for emitting visible light; a CCD camera (15) for measuring the reflected image reflected by the anti-reflection film of the solar cell (100); an infrared light source (13) for emitting infrared light onto the solar cell (100); and a CCD camera (16) for measuring the transmitted image transmitted through the solar cell (100). In this inspection device (1), the reflected image and the transmitted image are compared, and regions, from amongst regions representing bright spots in the reflected image, that represent dark spots in the transmitted image are determined to be regions including a particle, and regions, from amongst regions representing bright spots in the reflected image, other than those determined to include a particle are determined to be regions including a pin hole.
申请公布号 WO2013118296(A1) 申请公布日期 2013.08.15
申请号 WO2012JP53128 申请日期 2012.02.10
申请人 SHIMADZU CORPORATION;TAKAMI YOSHIO 发明人 TAKAMI YOSHIO
分类号 G01N21/88;G01M11/00;G01N21/894;H01L31/04 主分类号 G01N21/88
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