DRAWING METHOD AND DRAWING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a drawing device capable of calculating a radiation value obtained by correcting a proximity effect with higher accuracy.SOLUTION: A drawing device 100 of one embodiment of this invention includes a radiation value calculation unit 112 for solving an equation of stored energy by backscattering of charged particle beams defined by a polynomial expression having secondary or more items of an irradiation amount to calculate an irradiation amount, and a drawing unit 150 for irradiating a sample 101 with an electron beam 200 with the calculated irradiation amount to draw a pattern thereon. According to the invention, drawing can be performed with an irradiation amount obtained by correcting a proximity effect with higher accuracy.