| 摘要 |
The invention provides an organic EL device manufacture apparatus or deposition apparatus that can reduce affection of flexing of substrate and mask or warping of shadow mask, can reduce the generation of powder dust and gas in the vacuum by high precision deposition or configuring the drive part at the atmosphere side, and has high production character, high maintenance character and high work efficiency. Also provided is an alignment device and alignment method that can perform high precision positioning. The invention is characterized in that: firstly, the shadow mask is in contraposition to the substrate in a dependent pose to deposit the deposition material on the substrate; secondly, a permeation type using the light incident on the positioning through hole arranged on the shadow mask to perform positioning; and thirdly, the deposition is performed by reducing the warping of the shadow mask. |
