发明名称 Thin film transistor
摘要 A method is proposed for producing a thin-film transistor (TFT), the method comprising forming a substrate, applying a ZnO-based precursor solution onto the substrate to form a ZnO-based channel layer, annealing the channel layer, forming a source electrode and a drain electrode on the channel layer, forming a dielectric layer on the channel layer and forming a gate electrode on the dielectric layer.
申请公布号 US8507330(B2) 申请公布日期 2013.08.13
申请号 US20100845057 申请日期 2010.07.28
申请人 WANG CHUNMEI;NG WEI BENG;ISHIDA TAKEHISA;SONY CORPORATION 发明人 WANG CHUNMEI;NG WEI BENG;ISHIDA TAKEHISA
分类号 H01L21/84 主分类号 H01L21/84
代理机构 代理人
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