DEPOSITION SOURCE, DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS

摘要

PURPOSE: A deposition source, a deposition apparatus, and a method for manufacturing an organic light emitting display device are provided to perform a deposition process while moving a substrate, thereby easily obtaining the property of a deposition layer in a process for deposition on the total surface of the surface. CONSTITUTION: A stage (105) is arranged within a chamber (110). A deposition source (120) faces a substrate (101). The deposition source includes a crucible (121), a nozzle (122), and a hardening part (123,124). The nozzle spays a deposition material toward the substrate. The hardening part solidifies the deposition material formed on the substrate.